sputter-initiated RIS

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sputter-initiated RIS

physics

Also known as: SIRIS

Learn about this topic in these articles:

sputter atomization

In spectroscopy: Sputter atomization
In contrast, the sputter-initiated RIS (SIRIS) method takes advantage of the much more numerous neutral atoms emitted in the sputtering process. In SIRIS devices the secondary ions are rejected because the yield of these ions can be greatly affected by the composition of the host material (known as…
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