recoil sputtering
physics
Learn about this topic in these articles:
use of radiation
- In radiation: Surface effects
…somewhat more complex mechanism is recoil sputtering, in which a struck, recoiling surface atom undergoes a random sequence of elastic scatterings in the target material, ultimately migrating back to, and through, the surface. Yet another mechanism is prompt thermal sputtering, in which energized atoms in thermal spikes created close to…
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